X-ray analysis instrument

Abstract

PURPOSE: To permit X-ray analysis even if the incident quantity of X-rays entering an energy dispersion type X-ray spectroscope (EDS) at the max. stroke is large by providing an X-ray incidence limiting stop in front of said spectroscope and operating the spectroscope from the atm. side. CONSTITUTION: Electron rays 3 are projected to a sample 3 disposed in a body 1 of an electron microscope or the like to generate X-rays. A wavelength dispersion type X-ray analyzer (WDS) and EDS 8 are provided in the body 1 in order to spectrally split the X-rays. A semiconductor X-ray detector of the EDS 8 is mounted to the front end of a heat conductive bar 12 protected in a protective pipe 14 and is charged into the body 1. The pipe 14 is moved by the operation of an operation handle 10 from the atm. side by a moving stage 7 while the vacuum in the body 1 is maintained. An incident X-ray variable stop mechanism 15 is mounted to the front face of the X-ray detector 13 so as to move integrally with the pipe 14. The incident X-ray quantity by the mechanism 15 is changed over by a knob 16 mounted to the atm. side thereof while the vacuum in the body 1 is maintained. COPYRIGHT: (C)1988,JPO&Japio

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Cited By (2)

    Publication numberPublication dateAssigneeTitle
    JP-2005257349-ASeptember 22, 2005Sii Nanotechnology Inc, エスアイアイ・ナノテクノロジー株式会社Superconductive x-ray analyzer
    JP-2006292567-AOctober 26, 2006Sii Nanotechnology Inc, エスアイアイ・ナノテクノロジー株式会社Lens optical axis adjusting mechanism for x rays, lens optical axis adjusting method for x rays and x-ray analyzer