Pressure turning gear

Abstract

PURPOSE:To stabilize minute pressuring force of a polishing tool to a work surface, by installing an air outlet between a hydrostatic bearing, supporting a shaftlike rotor to which the tool is tightly attached, and a pressure cylinder, in case of an optical mirror polisher or the like. CONSTITUTION:A rotary part consisting of a polishing tool 40, a shaft 42, a rotor 44 and a rotor magnet 46, and a fixed part consisting of a cylinder 48 and a coil 50 both are made entirely rotated in noncontact and shiftable up and down by a fluid out of pads 62a and 62b or the hydrostatic bearing installed in the cylinder 48, for example, air pressure. And, if the air pressure is properly led into both sides of the rotor 44 from both lower and upper pressurized air inflow ports 52 and 56, the polishing tool 40 is added with the specified pressuring force. Here, since air outlets 64a-64c are installed between cylinder chambers 54, 58 and these pads 62a and 62b, respectively, no influence is exerted on each pressuring force. Thus, minute pressurizing force of the polishing tool against the work surface is stabilized, so that a highly accurate polishing surface is attainable.

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Cited By (6)

    Publication numberPublication dateAssigneeTitle
    CN-102166728-AAugust 31, 2011厦门大学磁浮式抛光工具盘
    EP-1386694-A1February 04, 2004Carl ZeissMethod of polishing and polishing machine
    EP-1386694-B2January 09, 2013Carl Zeiss Vision GmbHProcédé et machine de polissage
    JP-2010280039-ADecember 16, 2010Canon Inc, キヤノン株式会社研磨装置
    US-7588480-B2September 15, 2009Carl Zeiss Vision GmbhPolishing head for a polishing machine
    US-8011996-B2September 06, 2011Carl Zeiss Vision GmbhPolishing head for a polishing machine